The HS-CMR method was presented at the Japan Society of Applied Physics.

 

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At the 68th JSAP Spring Meeting (held March 16-19, 2021),
Assistant Professor Hara of the Center for Crystal Science and Technology,
Yamanashi University presented the our measurement technology “HS-CMR method”.
The title is “Effects of surface damage on current-modulating resistivity measurement of Si wafers”.