Product

Stand-alone Type

  • Up to 25 slices of wafer of 156 mm square can be stored in the cassette.
  • Well suited also for laboratory with its compact body.


Device Specification
Size: W900×D900×H560mm
Weight: Approx. 150㎏
Power: Single-phase AC100-230V
Operating environment: Temperature and Humidity 25±5℃・≦85%RH
Measurement Performance
Maximum capacity: 25 wafers(Cassette type/Continuously measuring capable)
Measuring time: 10 sec/wafer
Measuring method: Probe contact type
Measuring object: □156×t0.05 – 0.5㎜
Measuring range: 0.1 – 10.0Ω・cm

In-line Type for Full Inspection (TBD)

  • Corresponding to full inspection by connecting to the mass production line.
  • By customizing the number of wafers to be measured at the same time, inspection time can be shortened.
Device Specification
Size: W2.0×H1.5×D1.5 m
Weight: Approx. 500㎏
Power: Single-phase AC100-230V
Operating environment: Temperature and Humidity 25±5℃・≦85%RH
Measurement Performance
Measuring time: 1 sec/wafer
Measuring method: Probe contact type
Measuring object: □156×t0.05 – 0.5㎜
Measuring range: 0.1 – 10.0Ω・cm