Stand-alone Type
- Up to 25 slices of wafer of 156 mm square can be stored in the cassette.
- Well suited also for laboratory with its compact body.
| Device Specification | |
|---|---|
| Size: | W900×D900×H560mm |
| Weight: | Approx. 150㎏ |
| Power: | Single-phase AC100-230V |
| Operating environment: | Temperature and Humidity 25±5℃・≦85％RH |
| Measurement Performance | |
| Maximum capacity: | 25 wafers（Cassette type/Continuously measuring capable） |
| Measuring time: | 10 sec/wafer |
| Measuring method: | Probe contact type |
| Measuring object: | □156×t0.05 – 0.5㎜ |
| Measuring range: | 0.1 – 10.0Ω・cm |
In-line Type for Full Inspection (TBD)
- Corresponding to full inspection by connecting to the mass production line.
- By customizing the number of wafers to be measured at the same time, inspection time can be shortened.
| Device Specification | |
|---|---|
| Size: | W2.0×H1.5×D1.5 m |
| Weight: | Approx. 500㎏ |
| Power: | Single-phase AC100-230V |
| Operating environment: | Temperature and Humidity 25±5℃・≦85％RH |
| Measurement Performance | |
| Measuring time: | 1 sec/wafer |
| Measuring method: | Probe contact type |
| Measuring object: | □156×t0.05 – 0.5㎜ |
| Measuring range: | 0.1 – 10.0Ω・cm |
